Aluminum Nitride (AlN) Components

With high thermal conductivity, high wear and corrosion resistance, Aluminum Nitride (AlN) is the most ideal material for the semiconductor and medical industries. Typical applications include: heaters, electrostatic chucks, susceptors, clamp rings, cover plates and MRI equipment. Based on a depth of material engineering and development, MARUWA offers a wide range of technical capabilities and dependable mass-production capacity to meet customer’s requirements in the most advanced fields of semiconductor and medical applications.

List of Products



Semiconductor manufacturing equipment (heaters, electrostatic chucks, susceptors, clamps rings, cover plates) and medical equipment

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