Ceramics

Alumina | Al<sub>2</sub>O<sub>3</sub>

Alumina | Al2O3

Alumina substrates are produced under severe quality control with carefully selected high-purity alumina materials that ensures stable quality and excellent characteristics.

Material Characteristics for Alumina Substrates (Al2O3), Zirconia Toughened Alumina Substrates ( Al2O3/ZrO2), Aluminium Nitride Substrates (AlN), and Silicon Nitride (Si3N4)


Condition Unit Al2O3 Al2O3/ZrO2 AlN Si3N4
AS970 HA-96-2 HBS HRA HA-996 ZTA HRZ AN-170 SN-90
Material - - 96.5% 96% 96.5% 96% 99.6% Al2O3/ZrO2 Al2O3/ZrO2 AlN Si3N4
Color - - White White White White White White White Gray Gray
Bulk density - g/㎤ 3.74 3.75 3.75 3.60 3.90 4.00 3.85 3.30 3.22
Surface roughness Ra - µm 0.4 0.4 0.3 0.3 0.1 0.2 0.2 0.2 0.4
Reflectivity 0.3-0.4mmt % 70 70 70 85 75 80 87 35 -
0.8-1.0mmt 80 80 80 95 85 90 97 25 -
Mechanical Bending strength 3-point method MPa 450 400 500 370 470 700 550 450 800
Modulus of elasticity - GPa 330 330 330 - 330 310 - 320 310
Vickers hardness - GPa 14 14 14 - 16 15 14 11 15
Fracture toughness IF method MPa・m1/2 3.0 3.0 - - - 3.5 - 3.0 6.5
Thermal Coefficient of thermal expansion 40-400°C 10-6/K 6.7 6.7 6.7 6.7 6.8 7.1 7.1 4.6 2.6
40-800°C 7.8 7.8 7.8 7.8 7.9 8.0 8.0 5.2 3.1
Thermal conductivity 25°C W/(m・K) 24 24 24 20 29 27 23 180 85
300°C 12 12 12 - 13 16 - 120 -
Specific heat 25°C J/(㎏・K) 750 750 750 750 780 720 720 720 680
Electrical Dielectric constant 1MHz - 9.8 9.8 9.8 - 9.9 10.2 - 8.5 7.8
Dielectric loss factor 1MHz 10-3 0.2 0.2 0.2 - 0.05 0.2 - 0.3 0.4
Volume resistivity 25°C Ω・㎝ >1014 >1014 >1014 >1014 >1014 >1014 >1014 >1014 >1014
Breakdown strength DC ㎸/㎜ >15 >15 >15 >15 >15 >15 >15 >15 >15

Characteristic Values

  • Alumina-Characteristic Values
  • Alumina-Characteristic Values

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