Ceramics

Aluminum Nitride (AlN) Substrates

Aluminum Nitride (AlN) Substrates

Features


Aluminum Nitride (AlN) Substrates

MARUWA has started to produce Aluminum Nitride (AlN) substrates since 1985 and has developed its performance.
With both extremely high thermal conductivity (170-230W/mK) and insulating properties. MARUWA's AlN substrate can be the best solution in electronics applications where strict conditions are required, such as power modules (MOSFET, IGBT), LED packages for cooling and protecting circuits, packages and modules.

  • High thermal conductivity (170-230W/mK), up to 9.5 times than that of Alumina.

  • Similar coefficient of thermal expansion to that of silicon (Si). This helps to achieve high reliability of Si chip and thermal heat cycling.

  • Higher electric insulation, and Smaller dielectric constant.

  • Higher mechanical strength (450MPa).

  • Superior corrosion resistance against molten metal.

  • Very high purity, no toxicity.

Applications


Heat dissipation substrate, LED package, Power module, Wafer bonding, Power resistor.
*Various metalized processing is available (Thin film, Thick film, DBC, AMB, DPC, etc.).

Characteristic Values


Condition Unit AlN
AN-170 AN-200 AN-230
Material - - AlN AlN AlN
Color - - Gray Gray Beige
Bulk density - g/㎤ 3.30 3.28 3.25
Surface roughness Ra - µm 0.3 0.5 -
Reflectivity 0.3-0.4mmt % 35 - -
0.8-1.0mmt 25 - -
Mechanical Bending strength 3-point method MPa 450 250 200
Modulus of elasticity - GPa 320 - -
Vickers hardness - GPa 11 - -
Fracture toughness IF method MPa・√m 3.0 - -
Thermal Coefficient of thermal expansion 40-400°C 10-6/K 4.6 4.6 4.6
40-800°C 5.2 5.2 5.2
Thermal conductivity 25°C W/(m・K) 180 200 230
300°C 120 130 145
Specific heat 25°C J/(㎏・K) 720 720 720
Electrical Dielectric constant 1MHz - 9.0 8.7 8.7
Dielectric loss factor 1MHz 10-3 0.2 0.2 0.2
Volume resistivity 25°C Ω・㎝ >1014 >1014 >1014
Breakdown strength DC ㎸/㎜ >15 >15 >15

General Dimension


Item Unit Type
AN-170 AN-200 AN-230
Dimension inch(max) 5.5"×7.5" 5.0"×7.0" 5.0"×7.0"
Tolerance ±1% NLT:±0.1㎜ ±1% NLT:±0.1㎜ ±1% NLT:±0.1㎜
Thickness 0.25~1.5 0.25~1.5 0.25~0.635
Tolerance ±10% NLT:±0.04㎜ ±10% NLT:±0.04㎜ ±10% NLT:±0.04㎜
Through hole Φ0.2~ Φ0.2~ Φ0.2~
Tolerance ±0.6% NLT:±0.05㎜ ±0.6% NLT:±0.05㎜ ±0.6% NLT:±0.05㎜
Warpage 0.003/㎜ 0.003/㎜ 0.003/㎜

Processing


  • Mechanical Processing

  • Polishing / Lapping

  • Metalization

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