MARUWA's quartz glass products are manufactured with high-purity quartz materials which are chosen very carefully. Our strengths are in distinguished technologies and production systems that are under fully-controlled clean environment. We provide products based on customers' needs; quartz tube and quartz boat for manufacturing process (large-size available) of semiconductors, and for manufacturing process of next generation products (optical fiber / solar cell).
Installed large-diameter lathe and machining process equipments for targeting to manufacture next generation applications; 18 inches (450mm). Established the manufacturing technologies for large-size products, such as furnace tube for 12 inches (300mm) wafers.
Established precision grinding process with the cutting-edge NC machining center, and precision micromachining technology (small hole boring process, etc.). We can also take curve cutting process with laser cutting machines (ex. Pinhole for gas tube)
All of the process after firing process are under clean environment in order to avoid contamination on the products. Especially, shipping inspection, final cleaning, vaccum packaging processes are done under extremely controlled clean environment which is below class 1000. Therefore, it is possible to dispatch the products without any contaminations.
Available for all sorts of semiconductor manufacturing processes; diffusion CVD, washing, etching, etc.
Large size products, up to 12 inches (450mm), are available.
Over Flow Bath
MO-Available for each process, such as MO-CVD
Tube type reactor
Box type reactor
Available for each process; ex. optical fiber base materials, burner, chamber, etc.
Quartz Furnace Tube
Quartz Multi-tube Burner
Optical Fiber Base Materials with Pinhole Process
Quartz Products for silicon wafers are also available.
Introducing PureBeta, an ultra-pure, high-density SiC sintered material with excellent properties.
With high thermal conductivity, high wear and corrosion resistance, Aluminum Nitride (AlN) is the most ideal material for the semiconductor and medical industries. Typical applications include: heaters, electrostatic chucks, susceptors, clamp rings, cover plates and MRI equipment. Based on a depth of material engineering and development, MARUWA offers a wide range of technical capabilities and dependable mass-production capacity to meet customer’s requirements in the most advanced fields of semiconductor and medical applications.