MARUWA's quartz glass products are manufactured with high-purity quartz materials which are chosen very carefully. Our strengths are in distinguished technologies and production systems that are under fully-controlled clean environment. We provide products based on customers' needs; quartz tube and quartz boat for manufacturing process (large-size available) of semiconductors, and for manufacturing process of next generation products (optical fiber / solar cell).
Installed large-diameter lathe and machining process equipments for targeting to manufacture next generation applications; 18 inches (450mm). Established the manufacturing technologies for large-size products, such as furnace tube for 12 inches (300mm) wafers.
Established precision grinding process with the cutting-edge NC machining center, and precision micromachining technology (small hole boring process, etc.). We can also take curve cutting process with laser cutting machines (ex. Pinhole for gas tube)
All of the process after firing process are under clean environment in order to avoid contamination on the products. Especially, shipping inspection, final cleaning, vaccum packaging processes are done under extremely controlled clean environment which is below class 1000. Therefore, it is possible to dispatch the products without any contaminations.
Available for all sorts of semiconductor manufacturing processes; diffusion CVD, washing, etching, etc.
Large size products, up to 12 inches (450mm), are available.
Washing Process Tools
Available for each process, such as MO-CVD
Available for each process; ex. optical fiber base materials, burner, chamber, etc.
Quartz Products for silicon wafers are also available.
Quartz Glass Products are manufactured by MARUWA QUARTZ CO., LTD.
|Name||MARUWA QUARTZ CO., LTD.|
|Address||7-1, Ohdaira, Kumagami, Miharu-machi, Tamura-gun, Fukushima|
|Services||Production and sales of quartz glass
Sales of products related to semiconductor manufacturing