MARUWA's quartz glass products are manufactured with high-purity quartz materials which are chosen very carefully. Our strengths are in distinguished technologies and production systems that are under fully-controlled clean environment. We provide products based on customers' needs; quartz tube and quartz boat for manufacturing process (large-size available) of semiconductors, and for manufacturing process of next generation products (optical fiber / solar cell).
Large Size Products
Installed large-diameter lathe and machining process equipments for targeting to manufacture next generation applications; 18 inches (450mm). Established the manufacturing technologies for large-size products, such as furnace tube for 12 inches (300mm) wafers.
Micromachined Products
Established precision grinding process with the cutting-edge NC machining center, and precision micromachining technology (small hole boring process, etc.). We can also take curve cutting process with laser cutting machines (ex. Pinhole for gas tube)
Integrated Production under the Clean Environment
All of the process after firing process are under clean environment in order to avoid contamination on the products. Especially, shipping inspection, final cleaning, vaccum packaging processes are done under extremely controlled clean environment which is below class 1000. Therefore, it is possible to dispatch the products without any contaminations.
Product Groups
For Semiconductor Industry
Available for all sorts of semiconductor manufacturing processes; diffusion CVD, washing, etching, etc.
Large size products, up to 12 inches (450mm), are available.
Process Jigs
- Quartz Boat
- Other Jig
Washing Process Tools
- Over Flow Bath
- Carrier
- Guide
Tube Products
- Process tube
- Outer tube
- Inner tube
Etcher Products
- Chamber
- Ring
For Compound Semiconductor Industry
Available for each process, such as MO-CVD
- Tube type reactor
- Box type reactor
- Large Tray
For Optical Fiber Industry
Available for each process; ex. optical fiber base materials, burner, chamber, etc.
- Quartz Furnace Tube
- Quartz Multi-tube Burner
- Optical Fiber Base Materials with Pinhole Process
- Quartz Chamber
For Solar Cell Industry
Quartz Products for silicon wafers are also available.
- Quartz Tube
- Quartz Boat
Quartz Glass Products are manufactured by MARUWA QUARTZ CO., LTD.
| Name | MARUWA QUARTZ CO., LTD. |
|---|---|
| Address | 7-1, Ohdaira, Kumagami, Miharu-machi, Tamura-gun, Fukushima |
| Establishment | 1962 |
| Services | Production and sales of quartz glass Sales of products related to semiconductor manufacturing |
| Capital | 100,000,000 yen |
Product Inquiry
Quartz glass products are customized based on customers' requirements. For further information,
please contact our sales department through the inquiry form.
