| Kind |
Features |
Applications |
| 214 solid bar |
Transparent fused quartz solid bars with minimized air lines and foreign substances, and very stable dimensions. |
Processed and used for wafer carrier in the semiconductor industry. |
| 214 LD quartz tube |
Transparent fused quartz tubes with excellent features equal to those of 214. Used for large diameters. |
Used for diffusion, oxidation, LPCVD, etc. in the semiconductor industry. |
224 quartz tube,
LD tube, solid bar |
Excellent high-viscosity and appearance equal to those of 214. The alkali content is lowered to the PPB level by a special process. |
Used for a semiconductor diffusion furnace of severe conditions, under which even a very small quantity of alkaline component will adversely affect the chip yield. |
244 quartz tube,
LD tube, solid bar |
Equivalent to 224. The alumina level is lower. |
For customers looking for quartz with a low alumina level. |
| 124 ingot |
Used for transparent quartz plates and transparent window plates. Made from an ingot of 1.8 meter in diameter, 60 centimeters in height, and 4 tons in weight. High-purity material, containing very small bubbles occasionally. Made in various sizes and shapes. |
Used for wafer carrier and flange structure processing in the semiconductor industry. Also used for various chemical purposes that demand low cost and high quality. |
144 ingot
|
Equivalent to the 124 grade. The alumina, potassium, and sodium levels are lower. |
For customers looking for materials with low alumina, potassium, and sodium levels. |
| 012 ingot |
Transparent synthetic fused quartz ingot in the same shape as 124. |
The very high purity permits its use for plates and discs used in the most important semiconductor process. |
