MARUWA CO.,LTD. Product-CIRCUIT PRODUCTS-ALUMINA SUBSTRATES [ Al2O3 ]

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The Alumina substrates are produced under severe quality control with carefully selected high-purity Alumina materials that ensures stable quality and excellent characteristics.

■ Features

•	Surface State	:Good smoothness/flatness with less porosity due to fine particles. Excellent in adhesion with thick/thin film materials.
•	Dimensional Accuracy	:Less variance in outline, plate thickness, slit pitch, etc.
•	Warp	:Minimal warpage, bending, and undulation.
•	Thermal Characteristics	:Physical/chemical characteristics are stable even under a hot environment. Excellent in thermal shock resistance. High thermal
•	Mechanical Characteristics	:High mechanical strength and excellent resistance against oil and chemical.
•	Electrical Characteristics	:Excellent in insulation properties, high dielectric breakdown voltage, high surface resistivity/volume resistivity, and small dielectric constant.
•	Breakage	:Stable breaking strength, and less variance in shape/dimensions.

■Quality Characteristics

Item		Dimensional tolerance
Types of Alumina substrates		AS970	HA-96-2	HA-996
Dimensions	inch (max)	5''x4'' ±0.60%, NLT : ±0.05mm	5''x7'' ±0.5%~0.8%, NLT : ±0.08mm	5''x4'' ±0.60%, NLT : ±0.05mm
Plate thickness	mm	0.18~0.80 ±10.0%, NLT : ±0.04mm	0.25~1.20 ±10.0%, NLT : ±0.05mm	0.18~0.80 ±10.0%, NLT : ±0.04mm
Warp	mm	>0.06/25.4 ±0.24%, NLT : ±0.05mm	0.08/25.4 ±0.32%	0.08/25.4 NLT : ±0.05min
Through hole	mm	0.18~0.80 ±0.60%, NLT : ±0.05mm	Φ0.20~ ±10.0%, NLT : ±0.05mm	Φ0.20~ ±10.0%, NLT : ±0.05mm
Surface roughness	μm	0.3	0.3	0.1
Glazed surface roughness	μm	-	0.02	0.02

■Characteristic values

Item				AS970	HA-96-2	HA-996
Alumina purity		%		96.0	96.0	99.6
Bulk density		g/cm²		3.7	3.75	3.85
Color				white	white	white
Mechanical characteristics	Compressive strength	GPa		-	-	1.2
Mechanical characteristics	Bending strength	MPa		320	330	400
Thermal characteristics	Coefficient of linear expansion	×10^-6/K	25~800ºC	7.3	7.7	8.1
	Thermal conductive	W/m • K	25ºC	21.79	23.8	29.3
	Thermal conductive	W/m • K	300ºC	13.4	13.8	14.7
Electric characteristics	Dielectric constant		1MHz 25ºC	9.4	9.5	9.7
	Dielectric loss		1MHz 25ºC	0.0003	0.0003	0.0001
	Volume resistivity	Ω • m	25ºC	≥1x10¹⁴	≥1x10¹³	≥1x10¹³
			500ºC	8.2x10¹⁰	3x10⁷	8x10⁹
			700ºC	3.5x10⁷	4x10⁶	1x10⁷
	Dielectric breakdown voltage	KV/mm	AC60Hz	14	14	18

■Surface state • Photograph of Electron Microscope

■Surface Roughness Record Chart

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