Semiconductor Product

Installed large-diameter lathe and machining process equipments for targeting to manufacture next generation applications; 18 inches (450mm). Established the manufacturing technologies for large-size products, such as furnace tube for 12 inches (300mm) wafers.

• 

  Large Diameter Lathes

• 

Established precision grinding process with the cutting-edge NC machining center, and precision micromachining technology (small hole boring process, etc.). We can also take curve cutting process with laser cutting machines (ex. Pinhole for gas tube)

• 

  Example of micromachining

• 

  Example of fine hole by laser

All of the process after firing process are under clean environment in order to avoid contamination on the products. Especially, shipping inspection, final cleaning, vaccum packaging processes are done under extremely controlled clean environment which is below class 1000. Therefore, it is possible to dispatch the products without any contaminations.

Available for all sorts of semiconductor manufacturing processes; diffusion CVD, washing, etching, etc.
Large size products, up to 12 inches (450mm), are available.

• Tube Products

  

  • Process tube

  • Outer tube

  • Inner tube

• Process Jigs / Etcher Products

  

  • Quartz Boat

  • Other Jig

  • Chamber

  • Ring

• Washing Process Tools

  

  • Over Flow Bath

  • Carrier

  • Guide

• For Compound Semiconductor Industry

  ---

  

  MO-Available for each process, such as MO-CVD

  • Tube type reactor

  • Box type reactor

  • Large Tray

• For Optical Fiber Industry

  ---

  

  Available for each process; ex. optical fiber base materials, burner, chamber, etc.

  • Quartz Furnace Tube

  • Quartz Multi-tube Burner

  • Optical Fiber Base Materials with Pinhole Process

  • Quartz Chamber

• For Solar Cell Industry

  ---

  

  Quartz Products for silicon wafers are also available.

  • Quartz Tube

  • Quartz Boat

Introducing PureBeta, an ultra-pure, high-density SiC sintered material with excellent properties.

Ultra High Purity Fine Ceramics SiC Components (PureBeta)

With high thermal conductivity, high wear and corrosion resistance, Aluminum Nitride (AlN) is the most ideal material for the semiconductor and medical industries. Typical applications include: heaters, electrostatic chucks, susceptors, clamp rings, cover plates and MRI equipment. Based on a depth of material engineering and development, MARUWA offers a wide range of technical capabilities and dependable mass-production capacity to meet customer’s requirements in the most advanced fields of semiconductor and medical applications.

Aluminum Nitride (AlN) Component

Semiconductor manufacturing equipment (heaters, electrostatic chucks, susceptors, clamps rings, cover plates) and medical equipment