Aluminum Nitride (AlN) Substrates

Features

Aluminum Nitride (AlN) Substrates

MARUWA has started to produce Aluminum Nitride (AlN) substrates since 1985 and has developed its performance.
With both extremely high thermal conductivity (170-230W/mK) and insulating properties. MARUWA's AlN substrate can be the best solution in electronics applications where strict conditions are required, such as power modules (MOSFET, IGBT), LED packages for cooling and protecting circuits, packages and modules.

■High thermal conductivity (170-230W/mK), up to 9.5 times than that of Alumina
■Similar coefficient of thermal expansion to that of silicon (Si). This helps to achieve high reliability of Si chip and thermal heat cycling
■Higher electric insulation, and Smaller dielectric constant
■Higher mechanical strength (450MPa).
■Superior corrosion resistance against molten metal.
■Very high purity, no toxicity.

Applications

Heat dissipation substrate, LED package, Power module, Wafer bonding, Power resistor.
*Various metalized processing is available (Thin film, Thick film, DBC, AMB, DPC, etc.).

Characteristic Values

Characteristic Values

General Dimension

Item Unit Type
AN-170 AN-200 AN-230
 Dimension inch 5.5"×7.5" (standard) 5.5"×7.5" (max) 5.5"×7.5" (max)
15"×7.5" (max)
 Thickness mm 0.15≦ t ≦1.8 (standard)  0.15≦ t ≦1.5 0.15≦ t ≦0.635
10.0 (max)
 Through hole mm ≧φ0.1 ≧φ0.1 ≧φ0.1

Please contact us for special requirement (i.g. size, thickness, etc.).

Processing

MARUWA can also offer additional processing to meet your requirements.
We have technologies and extensive knowledges about ceramic materials and that's why high reliability of processed substrates can be provided.
 
 
Mechanical Processing
- Laser scribing
- Dicing (die cutting)
- Sandblasting
- MC processing
 
Polishing / Lapping
Item
Unit
Standard
Special
requirement
Tolerance
mm
t±0.02
t±0.005
Surface roughness
µm
Ra 0.03
Ra 0.001
 
Metalization
Suitable materials and substrates for various metalizing processes such as thin film, thick film, DBC, AMB, DPC can be offered to meet your requirement.
For more information, Go to "thin film metalization" page or  contact us.
 

Product Inquiries

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